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Uburyo bwihariye bwo gutunganya Al2O3 Ceramic Wafer Chuck
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Igikoresho cya Semiconductor cya ST.CERA cyihariye
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Agakoresho ko gukamura alumina ka santimetero 12 gakoreshwa mu gutunganya wafer ya mm 300
Agapfunyika ka St.Cera k’ubushyuhe bwa santimetero 12 gakozwe neza cyane gakozwe muri alumina ya 99.8% ifite ubuziranenge buhanitse (Al₂O₃) kugira ngo gakoreshwe mu buryo bwa wafer ya 300mm. Agapfunyika gafite ubuso buto buto (ubugari bwa groove 0.5–1.0 mm, ubugari bwa mm 2–3) kugira ngo gakwirakwizwe neza mu buryo bumwe muri 300mm. Ubugari bugumana muri 5 μm, bigatuma wafer ifata neza mu gihe cyo gukata, gusya inyuma no kugenzura. Uburemere bwinshi bw’ibikoresho (361 MPa) n’ubukana bwabyo (16 GPa) bitanga icyizere cyo kugumana ubusugire mu gihe kirekire ndetse no mu gihe cyo gukaraba kenshi.
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Ibikoresho bya Ceramic bikoreshwa mu gupima ibikoresho bya semiconductor
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Imodoka zitwara ibikoresho bya Ceramic Plate Semiconductor
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Ibikoresho bya Semiconductor Ibikoresho bya Ceramic
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Impeta y'ikimenyetso cya Alumina Ceramic ifite ubushyuhe bwinshi ikoreshwa mu gufunga icyumba gifite ubushyuhe bwinshi
Impeta yo gufunga ya St.Cera yakozwe nk'igisimbura impeta za polymer O-rings mu turere dukomeye aho elastomers zangirika. Yakozwe muri alumina ya 99.8% ifite pure nyinshi (Al₂O₃), iyi mpeta yo gufunga ikoreshwa mu gufunga idahinduka - akenshi ihuzwa na gasket y'icyuma cyoroshye cyangwa grafiti - kugira ngo itange vacuum cyangwa gaze ihamye ku bushyuhe bugera kuri 800°C no mu duce twa plasma cyangwa chemical. Ibikoresho ntibitanga umwuka uvamo, imbaraga nyinshi zo gukanda (imbaraga zo gukanda 361 MPa), kandi ntibigira chemical inert (irwanya halogens, aside, na alkali usibye HF). Ubuso bwo gufunga bufite imiterere yihariye (ubugari bwa ≤5 μm, ubugari bwa Ra ≤0.2 μm) butuma icyuma cyangwa ceramic bivamo neza.
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Impeta yo kwibanda ku cyumba cya Alumina gifite isuku nyinshi ikoreshwa mu gushushanya plasma na CVD systems
Impeta yo kwibandaho ya St.Cera ni igice cy'ingenzi cy'ibikoresho bikoreshwa mu bikoresho bya semiconductor bya plasma etch, CVD, na PVD. Yakozwe muri alumina ifite 99.8% ya alumina ifite pure nyinshi (Al₂O₃), iyi mpeta ikikije inkombe ya wafer kugira ngo ifunge plasma kandi yongere uburyo bwo gukwirakwiza inguni za ion, bityo inoze uburinganire bw'inkombe ku buso bwa wafer. Ibikoresho bitanga ubudahangarwa budasanzwe bwa plasma, imbaraga nyinshi za dielectric (15×10⁶ V/m), kandi bikagira ubushyuhe burambye kugeza kuri 1600°C, bitanga icyizere cy'igihe kirekire mu duce twa plasma dushingiye kuri fluorine cyangwa chlorine. Indangamuntu/OD yo hasi ikozwe neza n'ubugari (≤10 μm) bituma inkombe za wafer zishyirwa neza, bigabanya inenge zo mu nkombe no gukora uduce duto.
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Impeta ya Ceramic ya Alumina Ceramic ifite isuku nyinshi ikoreshwa mu byumba bya CVD / PVD
Impeta ya St.Cera ya ceramic yagenewe gukoreshwa mu byumba byo gutunganya CVD (Chemical Vapor Deposition) na PVD (Physical Vapor Deposition). Yakozwe muri alumina ifite 99.8% ya alumina ifite pure nyinshi (Al₂O₃), iyi mpeta ikora nk'icyuma gikingira plasma no kurinda inkuta z'ibyumba kwangirika. Ibikoresho bitanga ubudahangarwa bwiza bwa plasma, imbaraga nyinshi za dielectric (15×10⁶ V/m), kandi ikagira ubushyuhe burambye kugeza kuri 1600°C, bigatuma iramba mu bice bya plasma bishingiye kuri fluorine. Ubushobozi bwo kwihanganira ibintu neza (± 0.05 mm kuri ID/OD) no kuba ndende (≤10 μm) bituma habaho imiterere ihoraho ya wafer, kunoza imiterere y'aho ishyirwa no kugabanya umusaruro w'udusimba.
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Ifu ya Ceramic Vacuum Chuck ifite imyenge yo gukoresha Wafer ifunze neza
Agace k'ibumba gafite imyenge ya St.Cera gakozwe muri alumina ifite imyenge ifunguye neza ifite imyenge ingana na 30–45% kandi ifite imyenge ingana na μm 10 kugeza 100. Bitandukanye n'uduce dusanzwe dufite imyenge, ubuso bufite imyenge butanga imyenge ikwirakwijwe inyuma ya wafer yose, bugafata neza uduce duto, duto, cyangwa twifitemo imyenge tudatemba cyangwa ngo ducike. Agace koroheje (gashobora guhindurwa binyuze mu mupaka) kandi karinda ibimenyetso by'inyuma.
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Agakoresho ko mu bwoko bwa Alumina gafite imyenge yo gukoresha mu gutunganya umugati muke
Agace k'imyobo gakozwe muri alumina ka St.Cera gakozwe muri Al₂O₃ ifite 99.6% y'ubuziranenge buhanitse, gafite imyenge ifunguye ya 30–45%, kandi gafite ingano imwe y'imyobo iri hagati ya 10 na 50 μm. Bitandukanye n'uduce tw'imyobo, ubuso bw'imyobo butanga icyuho gikwirakwira inyuma ya wafer yose, bikuraho ibimenyetso by'inkombe kandi bigafasha gufata buhoro uduce tworoheje cyane (≤100 μm) cyangwa uduce tw'imyobo dupfundikiye. Ibikoresho bitanga imbaraga zo kuzunguruka za ≥250 MPa no kudahungabana k'ubushyuhe kugeza kuri 400°C mu kirere.
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Isahani yo gukwirakwiza gaze ya alumina kuri CVD/PVD Showerhead
Isahani yo gukwirakwiza gaze ya St.Cera (agace ko kwiyuhagiriramo) ikozwe mu buryo bunoze cyane ikoresheje alumina 99.8% ifite ubuziranenge buhanitse. Ifite utwobo duto (uburebure bwa mm 0.3–1.5) dutuma gaze itembera neza ku buso bwa wafer mu gihe cy'ibikorwa bya CVD, PVD, cyangwa ALD. Imbaraga nyinshi za dielectric za sahani (>15×10⁶ V/m) hamwe no kudakoresha plasma bituma iba ingenzi mu gushyira filime nto ya semiconductor.
