Ifu ya Ceramic Vacuum Chuck ifite imyenge yo gukoresha Wafer ifunze neza
Agace k'ibumba gafite imyenge ya St.Cera gakozwe muri alumina ifite imyenge ifunguye neza ifite imyenge ingana na 30–45% kandi ifite imyenge ingana na μm 10 kugeza 100. Bitandukanye n'uduce dusanzwe dufite imyenge, ubuso bufite imyenge butanga imyenge ikwirakwijwe inyuma ya wafer yose, bugafata neza uduce duto, duto, cyangwa twifitemo imyenge tudatemba cyangwa ngo ducike. Agace koroheje (gashobora guhindurwa binyuze mu mupaka) kandi karinda ibimenyetso by'inyuma.
Ibisobanuro(hashingiwe kuri 99.6% Al₂O₃):
| Umutungo | Agaciro |
| Ubwinshi bw'amabara | 30–45% |
| Ingano y'Umwobo Uciriritse | 10–100 μm (ishobora gutoranywa) |
| Imbaraga zo Kongera Uburemere | ≥250 MPa |
| Ubugari (burenga mm 300) | ≤5 μm |
| Kurangiza ubuso | Ifite imigozi (Ra 0.8 μm) |
| Urwego rukuru rw'ibikoresho byo mu bwoko bwa Vacuum | -80 kPa |
| Ubushyuhe bwo gukora | 400°C (umwuka), 600°C (ubushyuhe butagira icyo butwara) |
| Ibikoresho | 99,6% Al₂O₃, ZrO₂, cyangwa SiC |
Porogaramu:
Agace gato k'umugati (≤50 μm) gasya inyuma
Igikoresho cyo gukatamo uduce duto cyane
Gutoragura die imwe imwe ukoresheje kaseti
Uburyo bwo gucunga ikirahure
Inganda n'Ubwiza:
Ifu ya seramike ivanze n'udupira tw'imyenge y'umwimerere → ikandagiwe → ivanze → ifatanye kugeza ku bunini bwa nyuma. Buri gapfunyika kapimirwa uburyo bwo gusohora amazi mu buryo bumwe (≤5% deviation) kandi kagasuzumwa niba hari udupira dukwirakwira (SEM). Ubugari bwapimwe hakoreshejwe laser interferometer.
Ibyiza ugereranije na Grooved Chucks:
Nta gushushanya ku nkengero z'umugozi cyangwa guhindura imiterere y'umugozi
Ifata uduce duto tw’isukari (tugera kuri 500 μm)
Bikuraho kuziba kw'imyobo idafite umwuka
Inkunga yo kwiyinjiza ku butaka buto
Guhindura:
Imiterere y'uruziga cyangwa uruziga, ifite ingano igera kuri mm 600. Dushobora gushyiramo impeta zo gufunga impande cyangwa ibice by'ubushyuhe bw'aho biherereye. Ubwoko bw'ibyuma buboneka bitewe n'ibikenewe mu buryo buhamye.
Saba icyitegererezo cy'ingano ya wafer yawe n'ikizamini cya warpage.
