Impeta ya Ceramic ya Alumina Ceramic ifite isuku nyinshi ikoreshwa mu byumba bya CVD / PVD
Impeta ya St.Cera ya ceramic yagenewe gukoreshwa mu byumba byo gutunganya CVD (Chemical Vapor Deposition) na PVD (Physical Vapor Deposition). Yakozwe muri alumina ifite 99.8% ya alumina ifite pure nyinshi (Al₂O₃), iyi mpeta ikora nk'icyuma gikingira plasma no kurinda inkuta z'ibyumba kwangirika. Ibikoresho bitanga ubudahangarwa bwiza bwa plasma, imbaraga nyinshi za dielectric (15×10⁶ V/m), kandi ikagira ubushyuhe burambye kugeza kuri 1600°C, bigatuma iramba mu bice bya plasma bishingiye kuri fluorine. Ubushobozi bwo kwihanganira ibintu neza (± 0.05 mm kuri ID/OD) no kuba ndende (≤10 μm) bituma habaho imiterere ihoraho ya wafer, kunoza imiterere y'aho ishyirwa no kugabanya umusaruro w'udusimba.
Ibisobanuro (bishingiye kuri 99.8% Al₂O₃):
| Umutungo | Agaciro |
| Ibikoresho | 99.8% Alumina (Amahembe y'inzovu) |
| Ubucucike | 3.93 g/cm³ |
| Kunywa Amazi | 0% |
| Imbaraga zo Kongera Uburemere | 361 MPa |
| Gukomera kw'imvune | 3–4 MPa·m¹/² |
| Ubukomere bwa Vickers | 16 GPa |
| Modulus ya Young | 380 GPa |
| Ubushobozi bwo gutwara ubushyuhe | 32 W/m·k |
| Kwaguka k'ubushyuhe (25–1000°C) | 7.2×10⁻⁶/℃ |
| Imbaraga za Dielectric | 15×10⁶ V/m |
| Ubudahangarwa bwihariye | >10¹⁴ Ω·cm |
| Ubushyuhe ntarengwa bwo gukora | 1600°C |
Porogaramu:
- · Impeta zo mu cyumba cya CVD n'impeta zo mu mpande
- · Impeta zo mu cyumba cya PVD n'impeta zo gufunga
- · Imigozi yo gushushanya n'impeta zo gupfuka
- · Impeta zo gufunga plasma muri sisitemu ya dielectric etch
Uburyo bwo gukora:
Gukanda isostatic → imashini y'icyatsi kibisi → gusya kuri 1600°C → Gusya CNC ID/OD → gusya hejuru → gusukura hakoreshejwe ultrasound → Gusuzuma CMM 100%. Isosi yoroshye cyane (Ra ≤0.4 μm) igabanya gufatana kw'uduce.
Igenzura ry'Ubuziranenge:
- · Igenzura ry'ibipimo 100% (indangamuntu, OD, ubugari, ubugari)
- · Isuzuma ry'ibara ry'umukara ku buso bw'udukoko
- · Ikizamini cy'imbaraga za Dielectric kuri ASTM D149
- · Nta ibara cyangwa imyenge bigaragara munsi ya mikorosikopi ya 20×
Ibyiza ugereranije n'impeta z'icyuma cyangwa Quartz:
- · Igihe cy'ubuzima kirekire kurusha impeta za aluminiyumu muri plasma ya fluorine ni 5–10×
- · Nta kwanduzwa kw'icyuma mu duce duto
- · Ubudahangarwa bwinshi bwa plasma kurusha quartz (nta mwobo w'isuri)
- · Ibungabunga ubushyuhe bw'amashanyarazi >10¹⁴ Ω·cm ndetse na nyuma yo gukoreshwa igihe kirekire
Ibikoresho Bitandukanye — Silikoni Nitride (Si₃N₄):
Ku bikoresho bisaba gukomera cyane kw'ivunika (6.2 MPa·m¹/²) no kudashyuha cyane (coefficient yo kwagura 3.2 × 10⁻⁶/℃), impeta za Si₃N₄ zirahari. Ariko, alumina ihendutse cyane kuri porogaramu nyinshi za CVD/PVD. Nyamuneka garagaza ibikoresho ukunda mu gihe utumiza.
Guhindura:
- · Uduce duto two gushyiramo imyobo, uduce duto two gushyiramo ingazi, cyangwa uduce duto two gushyiramo
- · Ubuso butwikiriwe na Y₂O₃ kugira ngo bwongere ubudahangarwa bw'amaraso mu maraso (ni ngombwa)
- · Gushushanya nomero y'igice / kode y'ikibanza hakoreshejwe laser
Icyitonderwa:Amakuru yavuzwe haruguru akurikira neza imbonerahamwe y'umutungo wa Al₂O₃ yatanzwe. Ku bijyanye n'impeta za Si₃N₄, reba urupapuro rw'amakuru rwa Si₃N₄ rwatanzwe.
