Agapira gashyigikira Ceramic ko gukora ibikoresho bya semiconductor
Udupira two gushyigikira twa St.Cera's ceramic (tuzwi kandi nka lift pins cyangwa support pins) dukoreshwa mu byumba byo gutunganya ibintu bya semiconductor kugira ngo twongere udupira twa wafer cyangwa substrates mu gihe cyo gufata, gushyushya, cyangwa gukonjesha. Dukozwe muri 99.8% bya alumina cyangwa silicon nitride, utu dupira dutanga imbaraga nyinshi zo gukanda, ubushyuhe buhamye, no kudakoresha imiti. Imiterere ya wafer iteye nk'iy'umugongo cyangwa iy'umugongo irinda gushwanyagurika.
Ibisobanuro(Alumina 99.8%):
| Umutungo | Agaciro |
| Ibikoresho | 99.8% Al₂O₃ cyangwa Si₃N₄ |
| Uburebure | 10 - 100 mm |
| Ingano | mm 1 – 10 |
| Imiterere y'agace k'inyuma | Ikirenge, gifite impande zose, gifite icyerekezo |
| Imbaraga zo Gukanda (Al₂O₃) | >2000 MPa |
| Ubushyuhe Bunini bwo Gukora (Al₂O₃) | 1600°C |
| Kurangiza ubuso | Ifite imirasire irenga (Ra ≤0.4 μm) |
| Ubwihangane ku murambararo | ± 0.01 mm |
Porogaramu:
Udupira two guterura mu byumba bya CVD/PVD
Udupira two gutekesha mu isahani ishyushye
Imiterere y'inkunga y'amakarita y'igenzura
Inkunga y'ubwato bwa Quartz
Inganda:
Gusya neza OD nta gice cyo hagati → gusya diyama ku gice cyo hejuru → gusukura hakoreshejwe ultrasound → kugenzura 100% by'ibipimo.
Igenzura ry'Ubuziranenge:
CMM ku burebure/umurambararo, igereranya ry'amatara ku mpera y'umurambararo, isuzuma ry'umutwaro kugira ngo harebwe imbaraga zo gukanda (icyitegererezo gitunguranye kuri buri gice). Nta kwanduzwa kwa ferromagnetic (byemejwe hakoreshejwe magnet).
Ibyiza ugereranije n'udupira tw'icyuma cyangwa Quartz:
Igihe cy'ubuzima kirekire inshuro 5 ugereranyije n'icyuma kidashonga
Nta kwanduzanya kw'icyuma mu cyumba cyo gutunganya ibintu
Ubushobozi bwo gushyuha buri hejuru kurusha quartz (1600°C vs 1100°C)
Ubuso budafatana (kugabanuka kw'uduce dufatana)
Guhindura:
Imiterere myinshi y'inkombe, ishingiro rifite imigozi, cyangwa umugozi ufite imigozi.
Dutanga kandi udupira twa SiC ku bidukikije bikabije bya plasma.
