Isahani yo gukwirakwiza gaze ya alumina kuri CVD/PVD Showerhead
Isahani yo gukwirakwiza gaze ya St.Cera (agace ko kwiyuhagiriramo) ikozwe mu buryo bunoze cyane ikoresheje alumina 99.8% ifite ubuziranenge buhanitse. Ifite utwobo duto (uburebure bwa mm 0.3–1.5) dutuma gaze itembera neza ku buso bwa wafer mu gihe cy'ibikorwa bya CVD, PVD, cyangwa ALD. Imbaraga nyinshi za dielectric za sahani (>15×10⁶ V/m) hamwe no kudakoresha plasma bituma iba ingenzi mu gushyira filime nto ya semiconductor.
Ibisobanuro:
| Umutungo | Agaciro |
| Ibikoresho | 99.8% Al₂O₃ cyangwa SiC |
| Ingano | 100 – 1500mm (uruziga) cyangwa uruziga rw'impandeshatu |
| Ubunini | 5 - 20 mm |
| Umwanya w'umwobo | 0.3 – 1.5 mm |
| Ishusho y'umwobo | Ihariye (impandeshatu, kare, uburebure) |
| Ubugari | ≤10 μm hejuru y'ubuso bwose |
| Ubukana bw'ubuso | Ra ≤0.6 μm (uruhande rwa gaze) |
| Igipimo cy'ahantu hafunguye | 5–15% |
Porogaramu:
Amasahani yo kwiyuhagiriramo ya PECVD
Inshinge za gaze za ALD
Ibyuma byo gukwirakwiza gazi mu cyumba cyo gushushanya
Ibice bya MOCVD bya reactor
Inganda:
Alumina substrate ifite imigozi irambuye → Gucukura CNC hakoreshejwe ibikoresho bitwikiriwe na diyama (kwihanganira aho umwobo uherereye ± 0.02 mm) → Gukuraho ubushyuhe → Gusukura hakoreshejwe ikoranabuhanga → Gupfunyika mu cyiciro cya 100.
Igenzura ry'Ubuziranenge:
Buri plaque igenzurwa 100% kugira ngo harebwe ingano y'umwobo (uburyo bwo kureba), ubugari (interferometer ya laser), n'uburyo umwuka ugenda (ikarita y'umuvuduko). Nta mikorobe zigaragara munsi ya mikorosikopi inshuro 20.
Ibyiza ugereranije n'amasahani y'icyuma:
Nta kwanduzanya kw'icyuma mu mashusho yoroheje
Kugabanya uduce duto (ntitugire uduce twa corrosion)
Ihangana na plasma zo gusukura cyane (CF₄, NF₃)
Ibiranga byihariye:
Imiyoboro ya gaze inyuma, imyobo idafite aho ibohera, imigozi ifunga impande, n'ubwoko butandukanye bw'ibikoresho (SiC kugira ngo ubushyuhe burusheho kwiyongera, irangi rya Y₂O₃ kugira ngo plasma irangire).
Dutanga igenzura rya CAD no kwigana imikorere y'ibipimo mbere yo gukora.
