Impera y'Icyuma cya Teflon Ifite Ibara rya Ceramic – Ahantu hatariho ipfundo ry'ifatiro kugira ngo umuntu afate neza ifu ya Wafer
Ifu ya St.Cera's Teflon (PTFE) ivanze na alumina ifite imbaraga nyinshi hamwe na PTFE ifite ubushobozi bwo gucikamo ibice (ubugari bwa 15–30 μm). Ifu ya ceramic itanga ubushobozi bwo gucikamo ibice bike cyane (≤0.1), ubushobozi bwo kurwanya imiti, n'ubushobozi bwo kudafatana, ikarinda gufatana kwa wafer no gukuraho ubwandu bw'inyuma. Ifu ya ceramic ifite imbaraga nyinshi (99.8% Al₂O₃) itanga imbaraga nyinshi zo gucikamo ibice (361–1000 MPa), ubushobozi bwo kudashira, no kudahinduka k'ubushyuhe kugeza kuri 260°C (umupaka wo gupfuka). Iyi fu ya ceramic ni nziza cyane mu gufata wafer zoroshye, zoroshye, cyangwa zifatana (urugero, nyuma yo gupfuka cyangwa gukoresha imiti).
Ibisobanuro (ishingiye ku gice cya 99.8% cya Al₂O₃ gifite PTFE coating):
| Umutungo | Agaciro |
| Ibikoresho byo munsi y'ubutaka | 99.8% Alumina (Amahembe y'inzovu) |
| Ibikoresho byo gutwikira | PTFE (Teflon) |
| Ubunini bw'igitambaro | 15–30 μm |
| Korejiyo y'Uburinganire (Ifite Ifu) | ≤0.1 |
| Imbaraga zo Kongera Uburemere bw'Ingufu (Al₂O₃) | 361 MPa |
| Ubukomere bw'inyuma (Al₂O₃) | 16 GPa |
| Ubucucike bw'ubutaka | 3.93 g/cm³ |
| Ubushyuhe ntarengwa bwo gukora (umupaka ntarengwa wo gutwikira) | 260°C |
| Ubukana bw'ubuso (mbere yo gusiga irangi) | Ra ≤0.4 μm |
| Imbaraga za Dielectric (substrate) | 15×10⁶ V/m |
Icyitonderwa: Gutwikira PTFE bigabanya ubushyuhe ntarengwa kugeza kuri 260°C; ku bushyuhe bwinshi, tekereza ku bikoresho bya ceramic bidapfundikiye cyangwa ibindi bikoresho.
Porogaramu:
- · Gufata wafers nyuma yo gusiga photoresist (ubuso bufatana)
- · Kwimura uduce duto cyangwa tworoshye (bibuza gufatana)
- · Ibikoresho byo kugenzura ibyuma bipima n'ibipimo
- · Ikoranabuhanga ryo mu cyumba cyo gusukura aho ubwandu bw'udukoko bugomba kugabanywa
Uburyo bwo gukora:
Ibumba rya Ceramic rikozwe mu buryo bunonosoye kandi butunganye → Gukaraba ubuso (plasma etch cyangwa grit blast) → Gusiga irangi rya PTFE → Gushyushya ubushyuhe kuri 380°C → Igenzura rya nyuma. Buri gice cy'inyuma kigenzurwa niba hari ubunini bw'ibara (eddy current), gufatana (ikizamini cya cross-cut ASTM D3359), n'ingano y'ibara ry'ibara.
Igenzura ry'Ubuziranenge:
Igenzura ryimbitse 100% ry'ibice by'inyuma cyangwa utubyimba; ubugari bw'igipfundikizo bungana muri ± 5 μm; nta gutandukanya nyuma yo gupima 90° ku gipimo cyo kugurisha ku mutangabuhamya. Igenzura ry'ibipimo rijyanye n'ubushobozi bwa OEM (uburebure ± 0.05 mm, ubugari ≤0.1 mm).
Ibyiza ugereranyije n'ibitarimo irangi cyangwa ibindi biti:
- · Ubuso budafata butuma wafer ifatana kandi ikameneka
- · Igipimo gito cyane cy'ubushyuhe hagati y'ibirahure bya ceramic
- · Irwanya cyane imiti (aside, base, solvents)
- · Bigabanya umusaruro w'udukoko mu gukumira ihererekanya ry'ibintu
Inzitizi (amagambo ku kunyuranya kw'ibikoresho):
Igipfunyika cya PTFE ntigikomoka ku mbonerahamwe z’imiterere y’ibikoresho byatanzwe (Al₂O₃, ZrO₂, Si₃N₄, BeO). Imiterere y’ibipfunyika ikurikiza neza urupapuro rw’amakuru rwatanzwe (99.8% Al₂O₃). Imiterere y’igipfunyika ishingiye ku bipimo bya PTFE bisanzwe mu nganda, kuko nta makuru yatanzwe. Ku bipimo birenga 260°C, hasabwa gukoresha icyuma kidapfunyika cya ceramic.*
Guhindura:
Iboneka mu burebure bwa mm 150–1500, ifite imiterere y'inkombe (impande zo gufata, Bernoulli, ifite imiterere irambuye), imiterere y'urukiramende rwo gushyiraho kuri buri gishushanyo cya OEM. Irangi ry'igice (aho ihurira gusa) cyangwa irangi ryuzuye nta kundi byakorwa.
Saba icyitegererezo cyo gupima gufatana no gukururana kw'ibice.
