Impeta yo kwibanda ku cyumba cya Alumina gifite isuku nyinshi ikoreshwa mu gushushanya plasma na CVD systems
Impeta yo kwibandaho ya St.Cera ni igice cy'ingenzi cy'ibikoresho bikoreshwa mu bikoresho bya semiconductor bya plasma etch, CVD, na PVD. Yakozwe muri alumina ifite 99.8% ya alumina ifite pure nyinshi (Al₂O₃), iyi mpeta ikikije inkombe ya wafer kugira ngo ifunge plasma kandi yongere uburyo bwo gukwirakwiza inguni za ion, bityo inoze uburinganire bw'inkombe ku buso bwa wafer. Ibikoresho bitanga ubudahangarwa budasanzwe bwa plasma, imbaraga nyinshi za dielectric (15×10⁶ V/m), kandi bikagira ubushyuhe burambye kugeza kuri 1600°C, bitanga icyizere cy'igihe kirekire mu duce twa plasma dushingiye kuri fluorine cyangwa chlorine. Indangamuntu/OD yo hasi ikozwe neza n'ubugari (≤10 μm) bituma inkombe za wafer zishyirwa neza, bigabanya inenge zo mu nkombe no gukora uduce duto.
Ibisobanuro(hashingiwe kuri 99.8% Al₂O₃):
| Umutungo | Agaciro |
| Ibikoresho | 99.8% Alumina (Amahembe y'inzovu) |
| Ubucucike | 3.93 g/cm³ |
| Kunywa Amazi | 0% |
| Imbaraga zo Kongera Uburemere | 361 MPa |
| Gukomera kw'imvune | 3–4 MPa·m¹/² |
| Ubukomere bwa Vickers | 16 GPa |
| Modulus ya Young | 380 GPa |
| Ubushobozi bwo gutwara ubushyuhe | 32 W/m·k |
| Kwaguka k'ubushyuhe (25–1000°C) | 7.2×10⁻⁶/℃ |
| Imbaraga za Dielectric | 15×10⁶ V/m |
| Ubudahangarwa bwihariye | >10¹⁴ Ω·cm |
| Ubushyuhe ntarengwa bwo gukora | 1600°C |
Porogaramu:
- · Impeta zo gushyiramo ibikoresho by'amashanyarazi (oxide, nitride etch)
- · Impeta zo mu cyumba cy'impapuro za silicon etch
- · Impeta z'ibikoresho byo gutunganya CVD mu cyumba
- · Ingufu zo mu cyumba cya PVD n'impeta zo gufunga
Uburyo bwo gukora:
Ifu ya alumina ifite ubuziranenge bwinshi irakandagirwa mu buryo bwa isostatic → icyatsi kibisi gikozwe mu buryo bwa hafi ya net → gikozwe mu buryo bwa sinteri → gikozwe mu buryo bwa sinteri kuri 1600°C → Gusya diyama ya CNC ya ID, OD, n'ubugari → gusya kugira ngo igere ku buryo ingana ≤10 μm → Gusukura hakoreshejwe ultrasonic → Igenzura rya CMM 100%. Impera y'ubuso bwa Ra ≤0.4 μm igabanya gufatana kw'uduce.
Igenzura ry'Ubuziranenge:
- · Igenzura ry'ibipimo 100% (ID, OD, ubugari, uburinganire)
- · Isuzuma ryo gupima aho irangi ryacitse (ntibyemewe)
- · Isuzuma ry'amaso munsi ya mikorosikopi ya 20× — nta tubumbe, ubusa cyangwa ibara ry'uruhu
- · Ikizamini cy'imbaraga za Dielectric kuri ASTM D149 (icyitegererezo)
Ibyiza ugereranije na Silicon cyangwa Quartz Focus Rings:
- · Igihe cy'ubuzima kirekire cya 5–10× muri plasma ya fluorocarbon
- · Nta duce tw'isuri dushobora gukoreshwa kugira ngo twanduze wafer
- · Imbaraga nyinshi za dielectric zirinda guhagarara kw'umurambararo
- · Igumana ubugari n'ubuziranenge mu masaha ibihumbi ya RF
Ibikoresho Bitandukanye — Zirconia Ihamye ya Yttria (ZrO2)₂):
Ku bikoresho bisaba gukomera cyane kw'ivunika (urugero, ibyumba bifite ubushyuhe bwinshi cyangwa icyuma gishyushya), impeta zo gufatisha ZrO₂ (ubucucike bwa 6.03 g/cm³, imbaraga zo gupfuka 1000 MPa, gukomera kw'ivunika kwa 5–8 MPa·m¹/²) zirahari. Ariko, alumina itanga uburyo bworoshye bwo kugabanya ikiguzi kandi ni yo ngamba ikoreshwa mu nganda nyinshi zo gufatisha icyuma.
Guhindura:
- · Imiterere y'intambwe, imiyoboro yo ku ruhande, cyangwa imyobo yo gushyiraho kuri buri gishushanyo cy'umukiriya
- · Gusiga Y₂O₃ kugira ngo habeho ubudahangarwa bw'isuri mu maraso (ubugari bwa 20–100 μm)
- · Kugaragaza inomero y'igice, kode y'itariki, cyangwa ibimenyetso byo kuringaniza hakoreshejwe laser
Icyitonderwa:Amakuru yose akurikiza neza imbonerahamwe y'umutungo wa Al₂O₃ yatanzwe. Ku bisobanuro bya ZrO₂, reba urupapuro rw'amakuru rwa zirconia rwatanzwe. Imiterere y'impeta y'ifatizo ishobora gusaba uburenganzira bw'ipatanti - abakiriya nibo bafite inshingano zo kugenzura uburenganzira bw'umutungo bwite mu by'ubwenge.
