Bernoulli Ceramic End Effector — Uburyo bwo gufata Wafer idahuye n'aho ikoreshwa mu gukata Wafers zoroshye kandi zidafite imbaraga

Imashini ya St.Cera's Bernoulli ceramic effector ikoresha aerodynamic lift kugira ngo ifate wafers nta gukoraho. Yakozwe muri alumina ya 99.8% (Al₂O₃) cyangwa silicon carbide (SiC) ifite ubuziranenge buhanitse, ifite imiyoboro ikoreshwa neza isohora umwuka ushyushye kugira ngo ikore firime y'umwuka woroshye hagati ya effector na wafer. Iri hame ryo kudakoraho rikuraho ubwandu bw'inyuma, gucika kw'inkombe, no kwangirika k'ubuso, bigatuma iba nziza ku dupira tworoshye (≤100 μm), tworoshye, cyangwa duhindagurika. Iyi ceramic substrate itanga imbaraga nyinshi zo guhindagurika (361 MPa kuri Al₂O₃; kugeza kuri 550–600 MPa kuri SiC), uburemere buke, n'ubudahangarwa bwiza, bigatuma ishyirwa mu buryo burambye muri robo zitwara wafer zihuta cyane.

Icyitonderwa ku bikoresho:Alumina (Al₂O₃) ni yo ikoreshwa cyane mu gukoresha ibikoresho bya ceramic mu gutunganya wafer ya semiconductor bitewe n'uburyo ikora neza mu gukomerera, gukingira amashanyarazi, kudahindagurika kw'ibinyabutabire, no kugabanya ikiguzi. Silicon carbide (SiC) itanga ubushobozi bwo gutwara ubushyuhe bwinshi, gukomera cyane, ndetse no kudashira neza ku bikorwa bigoye cyane. Nubwo zirconia ihamye ya yttria (ZrO₂) itanga ubushobozi bwo gucika intege cyane mu bushyuhe bw'icyumba, ntabwo ikoreshwa cyane muri ubu buryo bitewe n'ubucucike bwayo bwinshi n'imiterere itandukanye y'ubushyuhe; ishobora kwitabwaho mu bihe runaka aho gucika intege gukomeye cyane. Nyamuneka gisha inama itsinda ryacu rya tekiniki kugira ngo rigufashe guhitamo ibikoresho.

Ibisobanuro(hashingiwe kuri 99.8% Al₂O₃):

Ihame ry'imikorere:

Umwuka ufunze cyangwa azote (0.2–0.6 MPa) utangwa binyuze mu miyoboro y'imbere n'isohoka binyuze mu mashini zitanga amazi. Umuyaga wihuta utuma habaho agace gafite umuvuduko muto hejuru y'ingufu (Bernoulli effect), bigatuma imbaraga zo guterura zishyigikira wafer ku cyuho cya 50–200 μm. Nta mwobo cyangwa udupfunyika tw'umwuka duhura na wafer inyuma.

Porogaramu:

• · Gufata agace gato (≤50 μm) nyuma yo gusya inyuma
• · Gutwara wafer ifite ibara ryijimye (urugero, nyuma yo kurwara indwara ya CVD cyangwa gufunga)
• · Kohereza uturemangingo tw'izuba na sapphire ya LED
• · Ikoranabuhanga ryo mu cyumba cyo gusukura risaba ko habaho uduce duto cyane
• · Uburyo bwo gutunganya ikirahure mu nganda

Uburyo bwo gukora:

Ifu ya Ceramic yakuwe mu ifu ifite ubuziranenge bwinshi → Imicungire ya CNC ifite umurongo wa 5 w’imiyoboro ya gaze n’imyobo y’iminwa (umurambararo wa mm 0.3–1.0, ubushobozi bwo kwihanganira ± 0.01 mm) → Gupima ubuso kugeza kuri Ra ≤0.4 μm → Gusukura hakoreshejwe ikoranabuhanga → ikizamini cyo kuvamo helium (imiyoboro ya gaze). Nta gusiga irangi bikenewe - ubuso bwa Ceramic budafite ubuziranenge nta kinyabutabire bufite kandi ntibuhumanya.

Igenzura ry'Ubuziranenge:

• · Igenzura ry’ibipimo 100% (CMM) ry’aho amazi ahagarara, uburebure bw’ukuboko, n’ubugari bw’aho umuntu ahagarara
• · Ikizamini cy'uko umwuka ugenda kimwe: kugabanuka k'umuvuduko ≤5% ku mazuru yose
• · Ikizamini cyo gusohora amazi: imiyoboro ya gazi ifunze kuri 0.6 MPa, nta kugabanuka k'umuvuduko mu masegonda 30
• · Gusuzuma amaso hakoreshejwe mikorosikopi ya 20× kugira ngo urebe ko hari uduce duto cyangwa uduce duto

AInyungu zirenze ingaruka zisanzwe zo gukoraho:

• · Nta kwanduzanya kw'inyuma kwa wafer — nta gukoranaho n'imashini
• · Nta gucika cyangwa gucika kw'inkombe z'amacupa magufi
• · Ifata uduce twa wafers twagoramye (kugeza kuri mm 1) dufite icyuho gihamye
• · Ikuraho moteri ikoresha umwuka uvamo umwuka n'uburyo bwo kubungabunga utubumbe tw'imashini
• · Ibyubakwa bya ceramic birwanya kwangirika no kwibasirwa n'imiti

Guhindura:

• · Iraboneka ku ngano za mm 200, mm 300, cyangwa ingano za wafer zihariye
• · Imiterere y'iminwa ya gaze: ubwoko bw'imivuduko igororotse, ifite inguni, cyangwa imiyaga
• · Ibikoresho: alumina (isanzwe) cyangwa karubide ya silikoni (kugira ngo ubushyuhe burusheho kwiyongera no kudashira)
• · Uburebure bw'ukuboko, icyuma gishyirwamo, n'aho gazi iherereye kuri buri gishushanyo cya OEM

Inzitizi:

Ishyirwa mu bikorwa ry’ihame rya Bernoulli (igishushanyo mbonera cy’iminwa, icyuho cy’umwuka) rirenze urugero rw’imbonerahamwe y’imiterere y’ibikoresho byatanzwe. Imiterere y’imashini n’ubushyuhe byavuzwe haruguru ikurikiza neza impapuro z’amakuru zatanzwe kuri 99.8% Al₂O₃. Nta kwangirika kw’imikorere y’ibumba munsi y’umuvuduko w’umwuka wiyongera bitewe n’iyi miterere y’ibikoresho. Ku biti by’umuvuduko bishobora kwangirika bitewe n’umuvuduko w’umwuka (urugero: MEMS ifite imiterere yoroshye), imiterere y’umuvuduko w’umwuka n’iminwa bigomba guhindurwa hakurikijwe iyo miterere.