Agakoresho ko gukamura alumina ka santimetero 12 gakoreshwa mu gutunganya wafer ya mm 300
Agapfunyika ka St.Cera k’ubushyuhe bwa santimetero 12 gakozwe neza cyane gakozwe muri alumina ya 99.8% ifite ubuziranenge buhanitse (Al₂O₃) kugira ngo gakoreshwe mu buryo bwa wafer ya 300mm. Agapfunyika gafite ubuso buto buto (ubugari bwa groove 0.5–1.0 mm, ubugari bwa mm 2–3) kugira ngo gakwirakwizwe neza mu buryo bumwe muri 300mm. Ubugari bugumana muri 5 μm, bigatuma wafer ifata neza mu gihe cyo gukata, gusya inyuma no kugenzura. Uburemere bwinshi bw’ibikoresho (361 MPa) n’ubukana bwabyo (16 GPa) bitanga icyizere cyo kugumana ubusugire mu gihe kirekire ndetse no mu gihe cyo gukaraba kenshi.
Ibisobanuro (ishingiye kuri 99.8% Al₂O₃):
| Umutungo | Agaciro |
| Ingano | mm 300 (inchi 12) |
| Ibikoresho | 99.8% Alumina (Amahembe y'inzovu) |
| Ubucucike | 3.93 g/cm³ |
| Imbaraga zo Kongera Uburemere | 361 MPa |
| Ubukomere bwa Vickers | 16 GPa |
| Ubugari (burenga mm 300) | ≤5 μm |
| Ubugari bw'inka | 0.5–1.0 mm |
| Ubushyuhe Bunini bwo Gukora | 800°C |
| Imbaraga za Dielectric | 15×10⁶ V/m |
Porogaramu:
Gukata no gushushanya wafer ya 300mm
Gusya inyuma ya wafer (icyuma gifasha gusya wafer)
Igenzura ry'amaso n'igenzura
Amapfundo yo gufatanya/gukuraho amapfundo by'agateganyo
Inganda:
CNC iraseswa hanyuma igashyirwa ku ruhande kugeza ingana, ikoresheje amapine ya diyama, isukurwa hakoreshejwe ikoranabuhanga rya ultrasonic, hanyuma ipakiye mu cyumba cyo gusukura cya Class 100. Buri gapfunyika kagenzurwa 100% kugira ngo harebwe niba gafite ubugari (interferometer ya laser) n'ubujyakuzimu bw'umuyoboro (profilometer).
Ibyiza:
Gukura uduce duto (≤0.05 uduce/cm²)
Ishobora kutagira imiti ihumanya ikirere n'aside mu buryo bwa chimique
Ubuso butagira ingaruka kuri ESD (ubudahangarwa >10¹³ Ω·cm)
Imiterere yihariye y'imyobo ikoreshwa mu gusohora umwuka n'aho gutwikira inyuma birahari.
