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Ibice bya Ceramic bya Alumina bifite imiterere ihanitse
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Ibikoresho bya semiconductor bya ST.CERA byihariye bya Ceramic Chucks
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Ingufu za Silicon Carbide (SiC) Ceramic End Effector – Ikomeye cyane mu gucunga Wafer mu bushyuhe bwinshi
St.Cera's SiC ceramic effector ikorwa muri silicon carbide ifite pure nyinshi (SiC content 99.72%, free Si 0.05%) hakoreshejwe ibikoresho bya S1111. Itanga imiterere idasanzwe ya mekanike: imbaraga zo kuzunguruka 449 MPa (ipimwa), elastic modulus 457 GPa (ipimwa), na Vickers hardness 25–28 GPa (isanzwe). Ubucucike buke (3.10–3.15 g/cm³, isanzwe) butanga ubukana bwihariye, bwiza ku ma robots yihuta cyane yo kohereza wafer. Hamwe n'ubushyuhe bwa 120–150 W/m·K (isanzwe) na coefficient yo kwagura ubushyuhe ya 4.0–4.5×10⁻⁶/℃ (isanzwe), iyi effector ikuraho ubushyuhe neza kandi ikabungabunga ubuziranenge mu gihe cyo gukoresha ubushyuhe bwinshi (kugeza kuri 1600–1700°C, nta mutwaro). Ibara ry'umukara/ikijuju n'amazi ntayo binjiza bitanga uburenganzira bwo guhuza icyumba cyo gusukura.
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Imashini ikoresha Silicon Carbide (SiC) ikoreshwa mu gukaraba ibidukikije bishyushye cyane n'ibikomoka kuri plasma
Agace k'ibumba gashingiye kuri SiC gakozwe muri karubide ya silikoni ifite pure nyinshi (batch S1111, SiC 99.72%, free Si 0.05%). Gatanga imbaraga zo kuzunguruka zingana na 449 MPa, gukomera kwa 3.12 MPa·m¹/², na modulus ya elastic ya 457 GPa. Uburyo busanzwe bwo gutwara ubushyuhe (120–150 W/m·K) n'ubushyuhe buke (4.0–4.5×10⁻⁶/℃) bituma ubushyuhe burushaho kwiyongera kandi hagafatwa warpage ntoya mu gihe cy'ubushyuhe. Agace k'ibumba gashobora gushyirwaho nk'agace k'ibumba gafite imyenge (gas flow) cyangwa agace gasanzwe gafite grooved. Hamwe n'ubushyuhe ntarengwa bwa 1600–1700°C (nta mutwaro) kandi gafite ubudahangarwa budasanzwe bwo kurwanya isuri muri plasma, aka gace ni keza cyane mu gutunganya wafer mu bushyuhe bwinshi (annealing, RTP) no mu byumba by'ibumba aho alumina chucks igabanuka.
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Ibikoresho bya Semiconductor Ibikoresho bya Ceramic Ibikoresho bya Ceramic
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Impeta yo gusya ya Alumina Ceramic ifite icyuma ikoreshwa mu gusya ikoresheje uburyo bworoshye bwo gufunga
Impeta yo gusya alumina ishingiye ku cyuma ya St.Cera ihuza urwego rwo hejuru rw’icyuma rwa alumina (99.8% Al₂O₃) hamwe n’icyuma gikozwe mu buryo bunoze (ubusanzwe ni aluminiyumu cyangwa icyuma kitagira umugese). Iyi miterere y’icyuma itanga ubushobozi bwo kudashira neza no kudashira neza kwa ceramic ku buso bwo gusya, mu gihe icyuma cyongera imbaraga za mashini, koroha kuyishyiraho, no kudacika intege. Urwego rwa alumina rutanga imbaraga zo gucika intege za 361 MPa, ubukana bwa Vickers bwa 16 GPa, no kudahinduka k’ubushyuhe kugeza kuri 800°C. Urwego rw’icyuma rugizwe n’imyobo yo gushyiramo, aho pin ziboneka, cyangwa ubushobozi bwa rukuruzi bwo gushyiramo imashini zikora, imashini zisya imibumbe, n’ibikoresho bya CMP.
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Ibikoresho bya Ceramic bikoreshwa mu gupima ibikoresho bya semiconductor
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Uburyo bwihariye bwo gutunganya Al2O3 Ceramic Wafer Chuck
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Igikoresho cya Semiconductor cya ST.CERA cyihariye
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Agakoresho ko gukamura alumina ka santimetero 12 gakoreshwa mu gutunganya wafer ya mm 300
Agapfunyika ka St.Cera k’ubushyuhe bwa santimetero 12 gakozwe neza cyane gakozwe muri alumina ya 99.8% ifite ubuziranenge buhanitse (Al₂O₃) kugira ngo gakoreshwe mu buryo bwa wafer ya 300mm. Agapfunyika gafite ubuso buto buto (ubugari bwa groove 0.5–1.0 mm, ubugari bwa mm 2–3) kugira ngo gakwirakwizwe neza mu buryo bumwe muri 300mm. Ubugari bugumana muri 5 μm, bigatuma wafer ifata neza mu gihe cyo gukata, gusya inyuma no kugenzura. Uburemere bwinshi bw’ibikoresho (361 MPa) n’ubukana bwabyo (16 GPa) bitanga icyizere cyo kugumana ubusugire mu gihe kirekire ndetse no mu gihe cyo gukaraba kenshi.
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Ingufu za Alumina Ceramic End Effector zifite imiyoboro ya Humus
Imashini ya St.Cera ikoresha icyuma gishyushya imashini ikoresha icyuma gishyushya imashini n'imyobo ikurura imashini mu buryo butaziguye mu mubiri wa alumina ifite 99.8%. Iyi miterere ikuraho icyuma gishyushya imashini, bigatuma imashini ifata icyuma ikoresheje icyuma gishyushya imashini ikoresha ...
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Ibice bya Alumina Ceramic Bitekanye bya ESD byo Gukoresha Wafer Idahinduka
Ibice bya alumina bya St.Cera's ESD (electrostatic discharge) bikozwe muri 99.8% by'ubuziranenge bwa Al₂O₃ bufite ubushobozi bwo guhangana n'ubuso bwa 10⁶–10⁹ Ω/sq, bugerwaho binyuze mu buryo bwihariye bwo gusiga cyangwa gutwikira. Ibi bice bikuraho neza amashanyarazi adahinduka, bikarinda kwangirika kwa electrostatic ku byuma bya semiconductor byangiritse n'ibikoresho. Ibikoresho by'ibanze bigumana imbaraga zabyo zo guhindagurika (361 MPa), ubukana (16 GPa), n'imbaraga za dielectric (15×10⁶ V/m). Ibice bya ceramic bidahinduka bya ESD birimo ibikoresho byo kurangira, imigozi yo kuzamura, inzira zo kuyobora, n'ibikoresho byihariye byo kwihutisha FAB.
