Ingufu za Silicon Carbide (SiC) Ceramic End Effector – Ikomeye cyane mu gucunga Wafer mu bushyuhe bwinshi
St.Cera's SiC ceramic effector ikorwa muri silicon carbide ifite pure nyinshi (SiC content 99.72%, free Si 0.05%) hakoreshejwe ibikoresho bya S1111. Itanga imiterere idasanzwe ya mekanike: imbaraga zo kuzunguruka 449 MPa (ipimwa), elastic modulus 457 GPa (ipimwa), na Vickers hardness 25–28 GPa (isanzwe). Ubucucike buke (3.10–3.15 g/cm³, isanzwe) butanga ubukana bwihariye, bwiza ku ma robots yihuta cyane yo kohereza wafer. Hamwe n'ubushyuhe bwa 120–150 W/m·K (isanzwe) na coefficient yo kwagura ubushyuhe ya 4.0–4.5×10⁻⁶/℃ (isanzwe), iyi effector ikuraho ubushyuhe neza kandi ikabungabunga ubuziranenge mu gihe cyo gukoresha ubushyuhe bwinshi (kugeza kuri 1600–1700°C, nta mutwaro). Ibara ry'umukara/ikijuju n'amazi ntayo binjiza bitanga uburenganzira bwo guhuza icyumba cyo gusukura.
Ibisobanuro(hashingiwe kuri raporo y'ikizamini cya SiC S1111 cyatanzwe n'agaciro gasanzwe):
| Umutungo | Agaciro |
| Ibikoresho | SiC (99.72% SiC, 0.05% Si y'ubuntu) |
| Ibara | Umukara/Ikijuju |
| Ubucucike | 3.10–3.15 g/cm³ |
| Kunywa Amazi | 0% |
| Imbaraga zo Kongera Uburemere | 449 MPa (impuzandengo) |
| Gukomera kw'imvune | 3.12 MPa·m¹/² (impuzandengo) |
| Modulus irashya | 457 GPa |
| Ubukomere bwa Vickers | 25–28 GPa |
| Ubushobozi bwo gutwara ubushyuhe (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Ubushyuhe bwo gukoresha ntarengwa (nta mutwaro) | 1600–1700°C |
Porogaramu:
● Uburyo bwo gufata wafer mu bushyuhe bwinshi (nyuma yo gufunga, RTP, epitaxy)
● Ibyumba byo gushushanya plasma bisaba kurwanya isuri cyane
● Roboti zitwara abantu zihuta cyane (zoroshye, zikomeye cyane)
Inganda:
Gutunganya ifu ya SiC → Gusya neza CNC ku buryo bwo gusya imiterere y'ukuboko no kuyishyiraho → Gusukura ubuso → Gusukura hakoreshejwe ikoranabuhanga rya ultrasound. Igenzura ry'ibipimo 100% n'isuzuma ry'amazi ya helium ku bijyanye no gukoresha vacuum.
Igenzura ry'Ubuziranenge:
● Isuzuma rya CMM ry'uburebure, ubugari, n'ubugari
● Ikizamini cy'imbaraga zo guhindagurika kuri buri cyiciro (kuri buri raporo y'ikizamini)
● Gusuzuma amaso hakoreshejwe mikorosikopi kugira ngo urebe niba hari inenge zo hejuru
Ibyiza ugereranije na Alumina cyangwa icyuma:
● Modulus ya elastic iri hejuru ya 2 × (457 vs ~380 GPa kuri alumina) - guhindagurika guke
● 3 × ubwiyongere bw'ubushyuhe - gukwirakwiza ubushyuhe vuba
● Ihangana n'ubushyuhe bwa >1600°C ugereranije na alumina ya 800°C mu kirere
● Ubucucike buri hasi ugereranije n'icyuma - kugabanya ibiro 40%
Guhindura:
Uburebure bwa mm 150–450, imiterere y'inkombe (impande zo gufata, Bernoulli, irambuye), imiterere y'urukiramende rwo gushyiraho kuri buri gishushanyo cya OEM.
*Amakuru yose ya tekiniki yavuzwe haruguru aturuka muri raporo y'ibizamini byatanzwe (batch S1111). Agaciro k'ubushyuhe n'ubukana ni ibisanzwe kuri iyi grade ya SiC; twandikire kugira ngo ubone icyemezo cyihariye.*
