Ibice bya Alumina Ceramic Bitekanye bya ESD byo Gukoresha Wafer Idahinduka
Ibice bya alumina bya St.Cera's ESD (electrostatic discharge) bikozwe muri 99.8% by'ubuziranenge bwa Al₂O₃ bufite ubushobozi bwo guhangana n'ubuso bwa 10⁶–10⁹ Ω/sq, bugerwaho binyuze mu buryo bwihariye bwo gusiga cyangwa gutwikira. Ibi bice bikuraho neza amashanyarazi adahinduka, bikarinda kwangirika kwa electrostatic ku byuma bya semiconductor byangiritse n'ibikoresho. Ibikoresho by'ibanze bigumana imbaraga zabyo zo guhindagurika (361 MPa), ubukana (16 GPa), n'imbaraga za dielectric (15×10⁶ V/m). Ibice bya ceramic bidahinduka bya ESD birimo ibikoresho byo kurangira, imigozi yo kuzamura, inzira zo kuyobora, n'ibikoresho byihariye byo kwihutisha FAB.
Ibisobanuro(hashingiwe kuri 99.8% Al₂O₃ hamwe n'ubuvuzi bwa ESD):
| Umutungo | Agaciro |
| Ibikoresho by'ibanze | 99.8% Alumina |
| Ubudahangarwa bw'Ubuso (ESD) | 10⁶–10⁹Ω/kare |
| Ubucucike | 3.93 g/cm³ |
| Imbaraga zo Kongera Uburemere | 361 MPa |
| Ubukomere bwa Vickers | 16 GPa |
| Modulus ya Young | 380 GPa |
| Kwaguka k'ubushyuhe (25-1000°C) | 7.2×10⁻⁶/℃ |
| Ubushyuhe Bunini bwo Gukora | 800°C |
| Imbaraga za Dielectric (mu bwinshi) | 15×10⁶ V/m |
Icyitonderwa: Uburinzi bwa ESD ku buso ntibutangwa mu mbonerahamwe y'imiterere y'ibikoresho byatanzwe. Urutonde rwavuzwe haruguru ni rwo rusanzwe mu nganda zikora ibikoresho bihumanya ikirere. Twandikire kugira ngo ubone raporo z'ibizamini.
Porogaramu:
● Ibikoresho bitanga umusaruro utekanye bya ESD mu kohereza wafer
● Imigozi yo gusya n'ibikoresho bya ESD mu bikoresho bya FAB
● Gerageza amasoko y'ibikoresho bidashobora kwangirika
● Gukoresha ibikoresho byo mu cyumba cyo gusukura aho kugenzura ibintu bidahinduka ari ingenzi cyane
Inganda n'Ubwiza:
Uburyo busanzwe bwo gutunganya alumina + ESD surface treatment → resistance surface pimie kuri ANSI/ESD STM11.11. Buri gice gipimwa 100% hifashishijwe electrode ya concentric ring.
Ibyiza:
● Birinda igihombo cy'umusaruro giterwa na ESD
● Ikomeza imbaraga za mekanike n'ubudahangarwa bw'imiti
● Nta gusohora uduce duto duturutse ku gusohora ibintu mu buryo butaziguye
