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Iroboti ya Alumina Ceramic ifite ubuziranenge bwinshi ikoreshwa mu gufata Wafer
Ukuboko kwa roboti ya alumina ya St.Cera kwakozwe neza cyane kuva kuri 99.8% Al₂O₃ (alumina) ifite ubuziranenge buhanitse. Ihuza imbaraga zidasanzwe zo kuzunguruka (361 MPa), ubukana bwinshi (16 GPa), n'ubucucike buke (3.93 g/cm³), bigatuma ukuboko kworoheje ariko gukomeye byo kohereza wafer ya semiconductor. Igipimo cyo kwaguka k'ubushyuhe (7.2 × 10⁻⁶/°C) gihuye na silikoni cyane, bigabanya ubushyuhe budahuye mu gihe cyo gutunganya.
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Bernoulli Ceramic End Effector — Uburyo bwo gufata Wafer idahuye n'aho ikoreshwa mu gukata Wafers zoroshye kandi zidafite imbaraga
Imashini ya St.Cera's Bernoulli ceramic effector ikoresha aerodynamic lift kugira ngo ifate wafers nta gukoraho. Yakozwe muri alumina ya 99.8% (Al₂O₃) cyangwa silicon carbide (SiC) ifite ubuziranenge buhanitse, ifite imiyoboro ikoreshwa neza isohora umwuka ushyushye kugira ngo ikore firime y'umwuka woroshye hagati ya effector na wafer. Iri hame ryo kudakoraho rikuraho ubwandu bw'inyuma, gucika kw'inkombe, no kwangirika k'ubuso, bigatuma iba nziza ku dupira tworoshye (≤100 μm), tworoshye, cyangwa duhindagurika. Iyi ceramic substrate itanga imbaraga nyinshi zo guhindagurika (361 MPa kuri Al₂O₃; kugeza kuri 550–600 MPa kuri SiC), uburemere buke, n'ubudahangarwa bwiza, bigatuma ishyirwa mu buryo burambye muri robo zitwara wafer zihuta cyane.
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Impera y'Icyuma cya Teflon Ifite Ibara rya Ceramic – Ahantu hatariho ipfundo ry'ifatiro kugira ngo umuntu afate neza ifu ya Wafer
Ifu ya St.Cera's Teflon (PTFE) ivanze na alumina ifite imbaraga nyinshi hamwe na PTFE ifite ubushobozi bwo gucikamo ibice (ubugari bwa 15–30 μm). Ifu ya ceramic itanga ubushobozi bwo gucikamo ibice bike cyane (≤0.1), ubushobozi bwo kurwanya imiti, n'ubushobozi bwo kudafatana, ikarinda gufatana kwa wafer no gukuraho ubwandu bw'inyuma. Ifu ya ceramic ifite imbaraga nyinshi (99.8% Al₂O₃) itanga imbaraga nyinshi zo gucikamo ibice (361–1000 MPa), ubushobozi bwo kudashira, no kudahinduka k'ubushyuhe kugeza kuri 260°C (umupaka wo gupfuka). Iyi fu ya ceramic ni nziza cyane mu gufata wafer zoroshye, zoroshye, cyangwa zifatana (urugero, nyuma yo gupfuka cyangwa gukoresha imiti).
