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Ibikoresho bya semiconductor bya ST.CERA byihariye bya Ceramic Chucks
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Ibikoresho bya Ceramic bikoreshwa mu gupima ibikoresho bya semiconductor
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
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Ibice bya Ceramic bya Alumina Ceramic bifite isuku nyinshi bikoreshwa mu nganda n'ibikoresho bya semiconductors
St.Cera ikora ibice bya alumina (Al₂O₃) bya keramike hakurikijwe ibisabwa n'umukiriya. Ikoresheje alumina ifite 99.8% by'ubuziranenge buhanitse, ibi bice bitanga imbaraga nziza zo kuzunguruka (361 MPa), ubukana bwinshi (16 GPa), n'imbaraga nziza za dielectric (15 × 10⁶ V/m). Byagenewe ibikoresho bya semiconductor, ibikoresho bidashobora kwangirika, ibyuma bikingira amashanyarazi, n'ibikoresho bikoresha ubushyuhe bwinshi, ibi bikoresho bitanga amazi hafi ya zero (0%) n'ubushyuhe bungana na 7.2 × 10⁻⁶/℃, bitanga ubuziranenge buhamye mu gihe cy'ibihe bikomeye.
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Agapira gashyigikira Ceramic ko gukora ibikoresho bya semiconductor
Udupira two gushyigikira twa St.Cera's ceramic (tuzwi kandi nka lift pins cyangwa support pins) dukoreshwa mu byumba byo gutunganya ibintu bya semiconductor kugira ngo twongere udupira twa wafer cyangwa substrates mu gihe cyo gufata, gushyushya, cyangwa gukonjesha. Dukozwe muri 99.8% bya alumina cyangwa silicon nitride, utu dupira dutanga imbaraga nyinshi zo gukanda, ubushyuhe buhamye, no kudakoresha imiti. Imiterere ya wafer iteye nk'iy'umugongo cyangwa iy'umugongo irinda gushwanyagurika.
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Ingufu nini za Alumina Ceramic Core zo gukoresha ibikoresho bya semiconductor
Urufatiro rwa alumina rwa St.Cera rugizwe n'ubuhanga buhanitse bukomoka kuri 99.8% Al₂O₃ ifite ubuziranenge buhanitse, itanga imbaraga zidasanzwe za dielectric (15 × 10⁶ V / m), ubushyuhe buhamye kugeza kuri 1600°C, kandi irwanya gucikagurika kw'amazi mu gihe cy'umutwaro. Izi ngingo zikoreshwa nk'ibice by'imiterere mu bikoresho bishyushya cyane, ibikoresho bishyushya, ibyuma bifunga by'icyuma bya plasma, n'ibikoresho bikingira amashanyarazi. Ubukana bwinshi bw'ibikoresho (16 GPa) n'amazi make (0%) bituma biramba mu bidukikije bikomeye.
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ST.CERA Yagenewe Impeta ya Alumina Ceramic na Disiki ya Ceramic
Ibikoresho bya ceramic bikozwe mu buryo bukonje kandi bigashyirwa mu muriro munsi y'ubushyuhe bwinshi, hanyuma bigakorwa neza kandi bigasenwa, bishobora kuzuza ibisabwa byose by'ibikoresho bya ceramic hamwe n'imiterere yabyo yo kudasaza, kudasaza, kwaguka gake k'ubushyuhe, no gukingira. Ceramics ishobora gukora mu bwoko bwinshi bw'ibikoresho bya ceramic bifite ubushyuhe bwinshi, umwuka uvamo cyangwa umwuka uhumanya igihe kirekire.
Yakozwe mu ifu ya alumina ifite isuku nyinshi, itunganywa hakoreshejwe uburyo bukonje bwo gukanda, gutwika ubushyuhe bwinshi no kurangiza neza, ishobora kugera ku rugero rwo kwihanganira uburebure bwayo kugeza kuri ± 0.001 mm, ubuso bwayo bugashyirwa kuri Ra 0.1, kandi ubushyuhe bwayo bugashyirwa kuri 1600°C.
