Alumina Vacuum Chuck yo gukata no gusya neza

Agakoresho ko gusya ka St.Cera gakozwe muri Al₂O₃ ifite 99.8% by’ubuziranenge bwo hejuru hamwe n’imiyoboro y’ubushyuhe ikozwe mu buryo bunoze. Ubushobozi bwacu bwo gusya neza butuma habaho ubugari bwa 0.003mm n’ubugari bwa 0.002mm, bigatuma wafer ikomeza guhindagurika mu gihe cyo gukata, gusya inyuma no kugenzura. Ibikoresho bitanga imbaraga nyinshi zo guhindagurika (361 MPa), ubukana (16 GPa), no guhagarara neza k’ubushyuhe kugeza kuri 800°C. Biboneka mu buryo bw’uruziga kugeza kuri 600mm inyuma y’umurambararo (OD) n’imiterere y’urukiramende kugeza kuri 1500mm. Imiyoboro y’ubushyuhe ikozwe mu buryo bwihariye (imiterere y’icyerekezo, imirasire, cyangwa imiyoboro y’amashanyarazi) kugira ngo ihuze n’ibisabwa mu buryo bwihariye. Buri gakoresho kagenzurwa hakoreshejwe interferometer ya laser kandi gahabwa raporo yo kugenzura ubugari.

Ibisobanuro (bishingiye kuri 99.8% Al₂O₃& Ubushobozi bwo gukora St.Cera):

Porogaramu:

• · Gukata no gushushanya ibishushanyo bya wafer (200mm/300mm no hejuru)
• · Gusya inyuma uduce duto tw'inyama
• · Igenzura ry'amaso n'igenzura
• · Uburyo bunini bwo gutunganya substrate

Uburyo bwo gukora ibintu neza:

• · Ubugororangingo: 0.005mm
• · Uburemere bw'impande: 0.005mm
• · Uburebure: 0.002mm
• · Ubugari: 0.01mm