Imashini zikoresha aluminium zisanzwe zikoresha vacuum cleaner chuck – Ifite ubushobozi bwo gukora imashini neza cyane
Iyi vacuum chuck ikozwe muri alumina ikozwe muri 99.8% Al₂O₃, itanga ubuso bworoshye butagira imyenge bufite imiterere yihariye ya vacuum groove. Itanga ubukana budasanzwe (Young's modulus 380 GPa) n'ubugari (≤3 μm), bigatuma iba nziza cyane mu gusya neza, gufunga no gukata neza wafers za semiconductor n'ibice by'urumuri. Ubushyuhe bwinshi bw'iyi mashini (32 W/m·k) butuma ubushyuhe bungana mu gihe cyo kuyitunganya.
Ibisobanuro(hashingiwe kuri 99.8% Al₂O₃):
| Umutungo | Agaciro |
| Ibikoresho | 99.8% Alumina (Amahembe y'inzovu) |
| Ubucucike | 3.93 g/cm³ |
| Imbaraga zo Kongera Uburemere | 361 MPa |
| Ubukomere bwa Vickers | 16 GPa |
| Modulus ya Young | 380 GPa |
| Ubushobozi bwo gutwara ubushyuhe | 32 W/m·k |
| Ubugari | ≤3 μm (irenga mm 200) |
| Ubushyuhe bw'ubuso (uruhande rw'agace k'inyuma) | Ra ≤0.4 μm |
| Ubushyuhe Bunini bwo Gukora | 800°C |
Porogaramu:
- · Gusya inyuma (bikomeye kandi bito)
- · Gukata neza ibikoresho byoroshye
- · Guhuza ibice by'ibumba
- · Gusukura lenzi z'urumuri
Inganda:
Guhuza impande zombi neza → gukata diyama (ni ngombwa) → gushushanya impande → gusukura hakoreshejwe ikoranabuhanga → kugenzura ubugari bwazo 100% hakoreshejwe laser interferometer.
Ainyungu:
- · Inkunga ikomeye igabanya guhindagurika kw'imizigo
- · Nta gukurura uduce duto duturutse ku miterere y'imyenge
- · Byoroshye gusukura (bihuye n'ibinure bisukura)
- · Imiyoboro y'umwuka ikoreshwa mu buryo bushobora guhindurwa (imiterere y'icyerekezo, imirasire, imiterere yihariye)
Ingano ziboneka:
Uzengurutse: 100mm, 150mm, 200mm, 300mm; kare/urukiramende iyo ubisabye.
Dutanga kandi verisiyo zishingiye ku byuma kugira ngo tugire imbaraga nyinshi mu byuma.
