Icupa ry'icyuma rikozwe mu cyuma rikoreshwa mu gucunga ifu y'isukari ifunze neza kandi ifunze neza
Agakoresho k'icyuma ka St.Cera gakoresha icyuma gahuza urwego rwa silicon carbide (SiC) rufite imyenge hamwe n'icyuma gikozwe neza (aluminium cyangwa icyuma kitagira umuhengeri). Ibikoresho bya SiC bifite imyenge (ubururu-umukara, imyenge 35–40%, ingano y'imyenge 20–30 μm, imyenge 60 ml/cm²·min) bitanga imyenge imwe kandi yoroshye ku buso bwose bwa wafer, bikuraho ibimenyetso by'inkombe kandi bigafasha idakora ku macupa magufi (≤100 μm) cyangwa ay'imyenge yagonze. Agakoresho ka SiC gatanga ubushyuhe buke (3.5 × 10⁻⁶/℃), ubushyuhe buhamye kugeza kuri 1000°C, n'imbaraga zoroshye zo guhindagurika (32–35 MPa). Ishingiro ry'icyuma ryongera ubukana bw'imiterere, byoroshye gushyiramo binyuze mu myobo ifite imigozi, kandi birinda kuvunika. Aka gakoresho ni keza cyane mu gusya inyuma, gukata ibice, no gutunganya wafer mu bushyuhe bwinshi aho imyenge imwe n'ubushyuhe ari ingenzi cyane.
Ibisobanuro (bishingiye ku makuru ya SiC afite imyenge):
| Umutungo | Agaciro |
| Ibikoresho bya Ceramic | Karubide ya Silicon ifite imyenge (SiC ≥80%) |
| Ibara | Ubururu-umukara |
| Ubwinshi bw'amabara | 35–40% |
| Ingano y'Umwobo | 20–30 μm |
| Ubucucike | 2.1–2.3 g/cm³ |
| Ubushobozi bwo kwihanganira | 60 ml/cm²·iminota |
| Imbaraga zo Kongera Uburemere | 32–35 MPa |
| Igipimo cyo kwagura ubushyuhe (25-1000°C) | 3.5×10⁻⁶/℃ |
| Ubushyuhe ntarengwa bwo gukora | 1000°C |
| Ubudahangarwa bw'amashanyarazi | 10⁻¹⁰ Ω/cm (kuri buri makuru yatanzwe, ibisanzwe kuri SiC ifite imyenge) |
| Ibikoresho by'ibanze by'icyuma | Aluminiyumu 6061 cyangwa Icyuma Kidafunze 304 (ni ngombwa) |
| Ubunini bw'icyuma | 10–30 mm (wihariye) |
Icyitonderwa: Imbaraga zo koroha ziri hasi ugereranyije na SiC nyinshi bitewe n'ubucucike. Imiterere y'icyuma ntabwo ikomoka ku meza ya ceramic.
Porogaramu:
- · Gusya inyuma uduce duto tw’inyama (≤100 μm)
- · Gushyiraho wafer igoramye yo gukata
- · Gucukura wafer mu bushyuhe bwinshi (kugeza kuri 1000°C)
- · Gukoresha imashini zikoresha umwuka udafite imyenge cyangwa zidafite imbaraga
Inganda:
Isahani ya SiC ifite imyenge (yakozwe n'udupira tw'imyenge, ikozwe mu buryo buteye ubwoba) → ifatanye kugeza igorofa ≤10 μm → icyuma gikozwe mu buryo bukoresha imiyoboro y'ingufu n'ibikoresho byo kuyishyiraho → epoxy bonding cyangwa mechanical clamping → helium leak test.
Igenzura ry'Ubuziranenge:
- · Ingano y'imyenge n'ubunini bw'imyenge byemejwe na SEM
- · Ikizamini cyo kwihanganira ubushyuhe (umuvuduko w'umwuka)
- · Ubugari bupimwe hakoreshejwe laser interferometer
- · Igipimo cyo kuva kwa Heliyumu <1×10⁻⁹ Pa·m³/s
Ibyiza ugereranije n'uduti twa Ceramic twashyizwemo ingano cyangwa twinshi:
- · Nta gushushanya wafer – vacuum imwe idafite utwenge twihariye
- · Kwisukura imyenge - kugabanya kuziba kw'imiyoboro
- · Ifata uduce twa wafers twagoramye (kugeza kuri 500 μm)
- · Ishingiro ry'icyuma ririnda kuvunika kw'ingufu kandi rikoroshya ishyirwa hamwe
Inzitizi:
- · Imbaraga nke zo gupfuka (32–35 MPa) – irinde ko ibintu bihinduka bitewe n'imbaraga zisanzwe.
- · Ubushyuhe bwo gukora bugarukira kuri 1000°C (SiC ifite imyenge), ariko icyuma gifata epoxy ishingiyeho kigarukira kuri ≤200°C keretse iyo gifashwe neza mu buryo bwa mashini.
- · Ntikoreshwa mu gusohora umwuka mwinshi (imiterere y'imyenge igabanya itandukaniro ry'imyenge)
Guhindura:
- · Ishingiro ry'icyuma: aluminiyumu (yoroshye), icyuma kidashonga (kirwanya ingese), Invar (igabanuka ryoroheje)
- · Guhuza: epoxy (≤200°C) cyangwa icyuma gifunga (kugeza kuri 500°C)
- · Impeta yo gufunga impande kugira ngo igenzure ahantu hadakoreshejwe umwuka
Icyitonderwa: Ingufu zo gupfuka (32–35 MPa) zitangwa ziri hasi cyane ugereranyije n'ibumba ryinshi bitewe n'imyenge. Bikore witonze kugira ngo wirinde gucika kw'inkombe.
